Item,Proposed value or evidence,Owner / source,Accepted revision / open question
Via group and layer span,,,
Depth endpoints and process stage,,,
Diameter definition,,,
Nominal dimensions and units,,,
Lower/upper dimensional bounds,,,
Bound sources and correlation,,,
Capture/target land geometry,,,
Fill/cap and stacking arrangement,,,
Supplier definition/evidence,,,
Decision and approved revision,,,